論文發表
Chun-Han Su, Zi-Han Lin, Yu-Shin Lin, and Hung-Fei Kuo, “Enhancement of Diffraction-Based Overlay Model for Overlay Target With Asymmetric Sidewall,” IEEE Transactions on Semiconductor Manufacturing, vol. 33 , pp 373-382 , 2020 .
Wei-Ming Kan, Yu-Ru Huang, Chao-Yi Huang, Chun-Sheng Wu, Kao-Tun Chen, Yu-Shin Lin, and Hung-Fei Kuo , “Placement of Sub-Resolution Assist Features Based on a Genetic Algorithm,” IEEE Access, vol.7, pp.86064-86076, July 2019.
Hung-Fei Kuo, Guan-Hsuan Kao, Liang-Xiu Zhua, Kuo-Shu Hung, Yu-Hsin Lin, “Printing line/space patterns on nonplanar substrates using a digital micromirror device–based point-array scanning technique,” Optics and Lasers in Engineering, vol.101, pp.106-112, Feb. 2018.
Frederick Lie, Chao-Yi Huang, Chun-Sheng Wu, Kao-Tun Chen, and Hung-Fei Kuo, “Demonstration of ACO-Based Freeform Source for ArF Laser Immersion Lithography System,” IEEE Access, vol.5, pp.6421 - 6428, Apr. 2017.
Hung-Fei Kuo and Anifatul Faricha, “Artificial Neural Network for Diffraction Based Overlay Measurement,” IEEE Access, vol.4, pp.7479 - 7486, Nov. 2016.
Hung-Fei Kuo, Muhamad Faisal, and Shun-Feng Su, “Linewidth Reconstruction Employing a Radial Basis Function Network in Optical Scatterometry,” IEEE Access, vol.4, pp.6739 - 6748, Nov. 2016.
Hung-Fei Kuo and Yi-Jun Huang, “Resolution Enhancement by Using Pulse Width Modulation in Digital Micromirror Device-Based Point-Array Scanning Pattern Exposure,” Optics and Lasers in Engineering, vol.79, pp.55-60, Apr. 2016.
Wei-Ming Kan, Yu-Ru Huang, Chao-Yi Huang, Chun-Sheng Wu, Kao-Tun Chen, Yu-Shin Lin, and Hung-Fei Kuo , “Placement of Sub-Resolution Assist Features Based on a Genetic Algorithm,” IEEE Access, vol.7, pp.86064-86076, July 2019.
Hung-Fei Kuo, Guan-Hsuan Kao, Liang-Xiu Zhua, Kuo-Shu Hung, Yu-Hsin Lin, “Printing line/space patterns on nonplanar substrates using a digital micromirror device–based point-array scanning technique,” Optics and Lasers in Engineering, vol.101, pp.106-112, Feb. 2018.
Frederick Lie, Chao-Yi Huang, Chun-Sheng Wu, Kao-Tun Chen, and Hung-Fei Kuo, “Demonstration of ACO-Based Freeform Source for ArF Laser Immersion Lithography System,” IEEE Access, vol.5, pp.6421 - 6428, Apr. 2017.
Hung-Fei Kuo and Anifatul Faricha, “Artificial Neural Network for Diffraction Based Overlay Measurement,” IEEE Access, vol.4, pp.7479 - 7486, Nov. 2016.
Hung-Fei Kuo, Muhamad Faisal, and Shun-Feng Su, “Linewidth Reconstruction Employing a Radial Basis Function Network in Optical Scatterometry,” IEEE Access, vol.4, pp.6739 - 6748, Nov. 2016.
Hung-Fei Kuo and Yi-Jun Huang, “Resolution Enhancement by Using Pulse Width Modulation in Digital Micromirror Device-Based Point-Array Scanning Pattern Exposure,” Optics and Lasers in Engineering, vol.79, pp.55-60, Apr. 2016.